VAST scanning technology enables form inspections at maximum speed with high-quality measuring results. Process changes are detected at an early stage, high production quality is ensured and rejected parts are reduced. equipped with self-centering probing, multi-point measurement of deeper features and reliable measurement of displaced features with size, form and position results also with high throughput thanks to the flexible VAST XT.
- Cermaic guideways in X and Z provide rigidity and protection against production-related environmental influences
- Air bearings on all axes for high stability at hih travel speeds
- Accuracy from 1.8um +L/300
Measuring Range (in mm)
1000 x 1200 – 2100 x 600